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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN 印刷: 1093-3611
ISSN オンライン: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.2015015703
pages 299-309

LOW-FREQUENCY INDUCTIVE TRANSFORMER-TYPE DISCHARGE FOR LARGE-SCALE PLASMA PROCESSING

Mikhail Isupov
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Lavrentiev Ave., Novosibirsk, 630090, Russia
Alexander Fedoseev
Kutateladze Institute of Thermophysics SB RAS, Novosibirsk, 630090, Russia
G. I. Sukhinin
Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Lavrentiev Ave., Novosibirsk, 630090, Russia; Novosibirsk State University, 2 Pirogov Str., Novosibirsk, 630090, Russia

要約

The electrophysical and thermophysical characteristics of a low-frequency (100 kHz) inductive transformer-type discharge have been investigated at an argon pressure of 10−100 Pa, discharge currents of 1−10 A, and a discharge chamber diameter of 230 mm. A self-consistent radial model of the low-frequency inductive transformer-type discharge based on the assumption of the Maxwellian electron energy distribution function and on the simultaneous solution of the balance equations for the electron and metastable atom densities, electron energy, and gas temperature, has been developed. The dependences of the electric field strength, electron and gas temperatures, electron density on the argon pressure and discharge current are calculated. It is shown that the numerical results are in satisfactory agreement with the results given by the probe and with the electric field strength measurements.


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