@article{Ricard_1997 author = {Andre Ricard and S. Al Ayoubi and S. Cavadias and Jacques Amouroux}, title = {EXCITED SPECIES AND C-ATOM DENSITY DOWNSTREAM AN Ar PLASMA TORCH WITH OLEFINS (CH4, CF4) IN IMPURITY}, journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes}, issn = {1093-3611}, year = {1997}, volume = {1}, number = {4}, pages = {485--492} }