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Telecommunications and Radio Engineering
SJR: 0.202 SNIP: 0.2 CiteScore™: 0.23

ISSN Imprimir: 0040-2508
ISSN On-line: 1943-6009

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Telecommunications and Radio Engineering

DOI: 10.1615/TelecomRadEng.v55.i9.110
6 pages

Photoelectric Silicon Film Transducers Produced by Magnetron Sputtering

A. C. Mazinov
Taurida National V.I. Vernadsky University, 4, Academician Vernadsky Ave., Simferopol, Ukraine, 95007; Crimean Scientific Centre, National Academy of Sciences of Ukraine, Ministry Education and Science, 2, Academician Vernadsky Ave., Simferopol, Ukraine
A. V. Karavaynikov
Vernadsky Tavria National University, 4, Yaltinskaya St., Simpheropol, 95038, Ukraine

RESUMO

The industrial process and equipment for solar thin-film batteries production from the hydrogenized amorphous silicon which is deposited by a magnetron sputtering techniques, is reviewed. A feature of a technique proposed is the capability of growing the layer structures as the completely finished photoelectric generator, in a unified basic cycle.


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