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Telecommunications and Radio Engineering
SJR: 0.203 SNIP: 0.44 CiteScore™: 1

ISSN Imprimir: 0040-2508
ISSN On-line: 1943-6009

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Telecommunications and Radio Engineering

DOI: 10.1615/TelecomRadEng.v68.i15.70
pages 1391-1398

Resonance Method for Thickness Determinant of Vacuum Evaporated Thin Films

A. V. Kuzmin
V. Karazin National University of Kharkiv, 4, Svoboda Sq., Kharkiv, 61077
V. Y. Semenenko
V. Karazin National University of Kharkiv, 4, Svoboda Sq., Kharkiv, 61077
Alexandr S. Posukhov
Karazin National University of Kharkiv
N. G. Stervoyedov
V. Karazin National University of Kharkov, 4, Svoboda Sq., Kharkiv, 61077

RESUMO

This paper deals with the methods of thickness measurement of the coated film by means of a quartz sensor. It has been found that the continuous control of thickness of thin films in the range of 10 to 100 nm can be exercised by the resonance method. The structure of nickel films and their thickness dependence on the resonance frequency of quartz crystal have been obtained and presented graphically.

Referências

  1. Gladkikh, N.P., The structure of thin films.

  2. Palatnik, L.N., The structure of interphase grains in thin films.

  3. Semenenko, E.E., Some physical aspects of cooling deposited films.

  4. Pierson, J., and Billard, A., Thin solid films.

  5. Azarenkov, M.О., Semenenko, V.E., and Pilipenko, М.М., Modern construction materials and composites.

  6. Azhazha, V.M., Semenenko, V.E., and Pilipenko, N.N., Ni-Ni3B Composite coating.

  7. Azhazha, V.M., Azarenko, N.A., Semenenko, V.E., and Podzolkova, V.V., Microstructure and hardness of natural composite materials.

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  9. Azarenkov, N.A., Semenenko, V.E., Stervoedov, N.G., and Podzolkova, V.V., The research system for the study of diffusion processes in metals and alloys by the radioactive method.


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