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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Publicou 4 edições por ano

ISSN Imprimir: 1093-3611

ISSN On-line: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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TRANSITION BETWEEN E-MODE AND H-MODE IN A CYLINDRICAL INDUCTIVELY COUPLED PLASMA REACTOR

Volume 14, Edição 1-2, 2010, pp. 119-127
DOI: 10.1615/HighTempMatProc.v14.i1-2.100
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RESUMO

An Inductively Coupled Plasma source was previously applied by us to surface treatment of a plastic material in moderate power conditions. In these conditions the coupling between the antenna and the plasma is capacitive and is usually referred to as E-mode. The machine has been modified to operate at working powers up to 1 kW, thus providing a real inductive coupling, referred to as H-mode.
The plasma is generated by applying a 13.56 MHz radio-frequency to a λ/ 4 antenna wrapped outside a quartz tube. The plasma chamber is evacuated by a rotary pump down to about 0.1 Pa and eventually fed with Argon at working pressures in the range from 1 to 100 Pa.
In the present work the transition from capacitive to inductive coupling mode is investigated by means of electrical and optical methods. The two methods are compared and experiments reveal that the transition occurs at decreasing power levels in the range between 100 and 200 W, while pressure is increased from 1 to 100 Pa. The percentage of power that is delivered to the plasma is investigated, too, and appears to be proportional to the input power.

CITADO POR
  1. Biganzoli Ilaria, Fumagalli Francesco, Fonzo Fabio Di, Barni Ruggero, Riccardi Claudia, A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition, Journal of Modern Physics, 03, 10, 2012. Crossref

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