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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.19 SNIP: 0.341 CiteScore™: 0.43

ISSN Imprimir: 1093-3611
ISSN On-line: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v6.i3.40
6 pages

THE EFFECTS OF CATHODE SPUTTERING ON IRON SURFACE

Jolanta Baranowska
Institute of Materials Engineering, Technical University of Szczecin AL Piastow 19, 70-310 Szczecin, Poland

RESUMO

The author presents results of investigations relative to the influence of cathode sputtering on iron surface. The samples were sputtered with nitrogen for different parameters: voltage 700-1350 V, current density 10-40 A/m2 and time 10-60 min. Changes on the surface were investigated using the following methods: SEM investigation of surface and cross-sections, SIMS (profile of nitrogen distribution), XRD structure analysis (GID technique), roughness measurements.
A strong influence of cathode sputtering on iron surface was observed. The roughness increased, moreover during the sputtering a chemical reaction between nitrogen and iron took place. This reaction resulted in nitrided zone formation. For some samples even a compact nitride layer was formed.


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