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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Publicou 4 edições por ano

ISSN Imprimir: 1093-3611

ISSN On-line: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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INTERNAL STRESS ANALYSIS IN THIN METALLIC FILMS BY COMBINING CURVATURE AND X-RAY DIFFRACTION METHODS

Volume 2, Edição 3, 1998, pp. 419-429
DOI: 10.1615/HighTempMatProc.v2.i3.100
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RESUMO

Structural and mechanical state of Cu and Mo thin films (200 nm) deposited on oxidised Si substrates have been analysed using X ray diffraction and mechanical spectroscopy. In this paper, we show the interest and the complementarity of the two methods to investigate stresses in thin films. The in plane stress values determined by the two methods in the copper films are in good agreement. In the case of molybdenum films, the values obtained indicate a very high compressive stress state, but we observed a large difference (≈ 2 GPa) between the stress magnitude determined with the two methods : 4.5 and 2.3 GPa for X-rays and curvature methods respectively. In order to explain this stress level difference which is certainly correlated to a particular structure of the deposits, we followed the evolution of the internal friction Q−1 and the mechanical state during thermal cycling in a temperature range 300-760 K.

CITADO POR
  1. Djemia P., Ganot F., Moch P., Branger V., Goudeau P., Brillouin scattering investigation of elastic properties of Cu–Mo solid solution thin films, Journal of Applied Physics, 90, 2, 2001. Crossref

  2. Goudeau P., George M., Coupeau C., Ion irradiation effects on the mechanical stability of compressed metallic thin films, Applied Physics Letters, 84, 6, 2004. Crossref

  3. Villain P., Renault P.-O., Goudeau Ph., Badawi K.F., X-Ray diffraction measurement of the Poisson's ratio in Mo sublayers of Ni/Mo multilayers, Thin Solid Films, 406, 1-2, 2002. Crossref

  4. Coupeau C., Atomic force microscopy study of the morphological shape of thin film buckling, Thin Solid Films, 406, 1-2, 2002. Crossref

  5. Boubeker B, Talea M, Goudeau Ph, Coupeau C, Grilhe J, On the Young's modulus of 304 L stainless steel thin films, Materials Characterization, 45, 1, 2000. Crossref

  6. Veyhl C., Fiedler T., Jehring U., Andersen O., Bernthaler T., Belova I.V., Murch G.E., On the mechanical properties of sintered metallic fibre structures, Materials Science and Engineering: A, 562, 2013. Crossref

  7. Goudeau P, Renault P.O, Villain P, Coupeau C, Pelosin V, Boubeker B, Badawi K.F, Thiaudière D, Gailhanou M, Characterization of thin film elastic properties using X-ray diffraction and mechanical methods: application to polycrystalline stainless steel, Thin Solid Films, 398-399, 2001. Crossref

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  9. Colin J., Cleymand F., Coupeau C., Grilhé J., Worm-like delamination patterns of thin stainless steel films on polycarbonate substrates, Philosophical Magazine A, 80, 11, 2000. Crossref

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