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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Publicou 4 edições por ano

ISSN Imprimir: 1093-3611

ISSN On-line: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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EFFECTS OF PLASMA PARAMETERS ON PASSIVATION OF POLYCRYSTALLINE SILICON IN INDUCTIVE LOW PRESSURE HYDROGEN PLASMA

Volume 11, Edição 2, 2007, pp. 297-308
DOI: 10.1615/HighTempMatProc.v11.i2.120
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RESUMO

Passivation of crystallographic defects by hydrogen is known to improve the transport properties and to enhance the photovoltaic yield of polycrystalline silicone (poly Si). However, it has been demonstrated that the efficiency of hydrogenation depends on the process used. The treatment of poly Si was performed in an inductive low pressure hydrogen plasma reactor. The aim of this work is to elucidate the relation between the plasma characteristics and the efficiency of hydrogen passivation on a poly Si surface. Optical emission spectroscopy permitted to determine the main excited states of monatomic hydrogen and molecular hydrogen in the plasma. The excitation temperature measured by Boltzmann's method ranged between 4500 and 8000K depending on the plasma gas composition, pressure and applied power. The effects of these parameters on the efficiency of hydrogenation were studied by SMS, EBIC, and hydrogen effusion.

CITADO POR
  1. Shalav Avi, Photovoltaics literature survey (No. 56), Progress in Photovoltaics: Research and Applications, 15, 6, 2007. Crossref

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