RT Journal Article ID 259de5d24bc6a5bb A1 Mazinov, A. C. A1 Karavaynikov, A. V. T1 Photoelectric Silicon Film Transducers Produced by Magnetron Sputtering JF Telecommunications and Radio Engineering JO TRE YR 2001 FD 2001-09-01 VO 55 IS 9 OP 6 AB The industrial process and equipment for solar thin-film batteries production from the hydrogenized amorphous silicon which is deposited by a magnetron sputtering techniques, is reviewed. A feature of a technique proposed is the capability of growing the layer structures as the completely finished photoelectric generator, in a unified basic cycle. PB Begell House LK https://www.dl.begellhouse.com/journals/0632a9d54950b268,14dbcb2d5d53f91e,259de5d24bc6a5bb.html