%0 Journal Article %A Smyaglikov, I. P. %A Chubrik, N. I. %A Goncharik, S.V. %A Azharonok, V. V. %A Krat'ko, L. E. %A Chekan, N. M. %D 2010 %I Begell House %K discharge, carbon plasma, spectrum, probe, temperature %N 1-2 %P 157-163 %R 10.1615/HighTempMatProc.v14.i1-2.130 %T SPECTROSCOPIC AND PROBE DIAGNOSTICS OF CARBON PLASMA FLOWS OF A PULSE VACUUM ARC %U https://www.dl.begellhouse.com/journals/57d172397126f956,227c67f42b79464a,4b33974128b6a1e4.html %V 14 %X The high-current pulsed arc discharge in vacuum used for technology of diamond-like carbon coating deposition is considered. The pulse-periodic carbon plasma flows are generated as a result of graphite cathode sputtering with the use of four-electrode arc system with self-recovering thin-film conductor of ignition device. It was found that fluctuations of plasma radiation intensity are due to formation and decay of cathode spot groups with lifetime of 5−10 μs. Three characteristic spatial zones of discharge radiation are observed - cathode spots, diffuse radiation area of carbon ions near the cathode spots, and molecular carbon emission in the interelectrode gap near the anode attachment. The value of gas-kinetic temperature of plasma was found to be about 1000 K while the plasma electron temperature is approximately 10 eV. %8 2010-04-20