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MEMS SENSORS FOR TURBULENCE MEASUREMENTS AND FLOW CONTROL

Lennart Lofdahl
Chalmers University of Technology, 412 96 Goteborg, Sweden

Resumo

This is a review of MEMS (Micro Electrical Mechanical Systems) based sensors for measurements of instantaneous flow quantities. Specifically sensors for fluctuating pressure and wall shear stress are the focus, and for these sensors the requirements from a fluid dynamic perspective are established, some basic design properties are discussed and a brief survey of existing MEMS sensors are given. It is found that the MEMS sensors have some obvious advantages as compared to conventional variants; however, in using MEMS sensors for turbulence measurements and flow control a significant issue is to clarify their uniqueness as compared to conventional sensors.