Главная > Begell House авторы, редакторы и рецензенты
E. Katsia
Plasma Technology Lab, Dept. Chem. Engineering, University of Patras, P.O.Box 1407, 26500 Patra, Greece
Articles:
INFLUENCE OF NEGATIVE SUBSTRATE BIAS ON PLASMA PROPERTIES AND SILICON FILM DEPOSITION RATE - Vol. 11 '2007 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes