Yu. S. Pavlov

Laboratory of Radiation Technologies, A.N. Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences (IPCE RAS), Moscow, 119071, Russia

Articles:

HIGH-RATE HIGH-DENSITY ICP ETCHING OF GERMANIUM - Vol. 23 '2019 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes