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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360

Выпуски:
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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.2016016017
pages 189-200

PROCESS OF FORMATION OF SPHEROIDAL GOLD PARTICLES AND OF NANOPHASES IN AlN−TiB2−TiSi2 COATINGS AFTER ANNEALING WITH SUBSEQUENT IMPLANTATION

Artem Demianenko
Sumy State University, Sumy, Ukraine
Katerina Smyrnova
Sumy State University, Sumy, Ukraine
Bahyt Zhollybekov
KaraKalpak State University, KaraKalpak, Uzbekistan
Anatoliy Kupchishin
Kharkiv Polytechnic University, Kharkiv, Ukraine
Yoshihiko Takeda
National Institute for Material Science, Japan
Hiroshi Amekura
National Institute for Material Science, Japan
Henryk Komsta
Institute of Transport, Combustion Engines and Ecology, Lublin University of Technology, Lublin, Poland
Marek Opielak
Institute of Transport, Combustion Engines and Ecology, Lublin University of Technology, 36, Nadbystrzycka Str., 20-618 Lublin, Poland
Konrad Kierczynski
Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, Lublin, Poland

Краткое описание

This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN−TiB2−TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

Ключевые слова: magnetron sputtering, annealing, implantation

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