Доступ предоставлен для: Guest
Портал Begell Электронная Бибилиотека e-Книги Журналы Справочники и Сборники статей Коллекции
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360

Выпуски:
Том 23, 2019 Том 22, 2018 Том 21, 2017 Том 20, 2016 Том 19, 2015 Том 18, 2014 Том 17, 2013 Том 16, 2012 Том 15, 2011 Том 14, 2010 Том 13, 2009 Том 12, 2008 Том 11, 2007 Том 10, 2006 Том 9, 2005 Том 8, 2004 Том 7, 2003 Том 6, 2002 Том 5, 2001 Том 4, 2000 Том 3, 1999 Том 2, 1998 Том 1, 1997

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v2.i1.110
pages 143-154

STRUCTURE AND PROPERTIES OF CARBON AND HYDROCARBON FILMS DEPOSITED IN PLASMA OF LOW-PRESSURE ARC AND UNBALANCED DC MAGNETRON

I.A. Anisimova
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic
V.P. Anisimov
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic
V.P. Makarov
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic
D.K. Otorbaev
Institute of Chemistry and Chemical Technology - Kyrgyz National Academy of Sciences Prospect Chui 265 A - 720071 - Bishkek - Kyrgyz Republic

Краткое описание

Amorphous hydrogenated carbon films were deposited in the plasma of a low-pressure arc discharge burning at the evaporating graphite electrode and in the plasma of a unbalanced magnetron sputtering discharge in different gas environments (Ar, CH4). The film structure was investigated by micro-diffraction method of transmission electron microscopy. Influence of the deposition technique and of the gas composition on the structure and on optical and electrical properties of the deposited films have been investigated.

Ключевые слова: hydrocarbon films, plasma deposition