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ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360
Indexed in
THE EFFECTS OF CATHODE SPUTTERING ON IRON SURFACE
Краткое описание
The author presents results of investigations relative to the influence of cathode sputtering on iron surface. The samples were sputtered with nitrogen for different parameters: voltage 700-1350 V, current density 10-40 A/m2 and time 10-60 min. Changes on the surface were investigated using the following methods: SEM investigation of surface and cross-sections, SIMS (profile of nitrogen distribution), XRD structure analysis (GID technique), roughness measurements.
A strong influence of cathode sputtering on iron surface was observed. The roughness increased, moreover during the sputtering a chemical reaction between nitrogen and iron took place. This reaction resulted in nitrided zone formation. For some samples even a compact nitride layer was formed.