High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
Выходит 4 номеров в год
ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360
IF:
0.4
Immediacy Index:
0.1
Eigenfactor:
0.00005
JCI:
0.07
SJR:
0.198
SNIP:
0.48
CiteScore™::
1.1
H-Index:
20
Indexed in
IMPURITY COMPOSITION OF ATOMIC HYDROGEN BEAM FORMED BY A LOW-PRESSURE ARC-DISCHARGE SOURCE WITH SELF-HEATED CATHODE
Том 11,
Выпуск 4, 2007,
pp. 565-573
DOI: 10.1615/HighTempMatProc.v11.i4.80
Краткое описание
Results of impurity composition investigation of large-area atomic hydrogen beam formed by a low-pressure arc discharge source with self-heated cathode was cited. The study was performed on 18 metallic elements. Method, based on measurement of sheet concentration of metal atoms on Si sample surface before and after exposition in AH flow was used for determination of composition of impurities in AH beam. Measurement of sheet concentration of metal atoms was realized by time of fly secondary ion mass spectroscopy. The method sensitivity was 108 at cm−2. Principal reason of parasitic metal particles occurrence in the beam was investigated.
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