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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

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ISSN Печать: 1093-3611

ISSN Онлайн: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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IMPURITY COMPOSITION OF ATOMIC HYDROGEN BEAM FORMED BY A LOW-PRESSURE ARC-DISCHARGE SOURCE WITH SELF-HEATED CATHODE

Том 11, Выпуск 4, 2007, pp. 565-573
DOI: 10.1615/HighTempMatProc.v11.i4.80
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Краткое описание

Results of impurity composition investigation of large-area atomic hydrogen beam formed by a low-pressure arc discharge source with self-heated cathode was cited. The study was performed on 18 metallic elements. Method, based on measurement of sheet concentration of metal atoms on Si sample surface before and after exposition in AH flow was used for determination of composition of impurities in AH beam. Measurement of sheet concentration of metal atoms was realized by time of fly secondary ion mass spectroscopy. The method sensitivity was 108 at cm−2. Principal reason of parasitic metal particles occurrence in the beam was investigated.

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