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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360

Выпуски:
Том 23, 2019 Том 22, 2018 Том 21, 2017 Том 20, 2016 Том 19, 2015 Том 18, 2014 Том 17, 2013 Том 16, 2012 Том 15, 2011 Том 14, 2010 Том 13, 2009 Том 12, 2008 Том 11, 2007 Том 10, 2006 Том 9, 2005 Том 8, 2004 Том 7, 2003 Том 6, 2002 Том 5, 2001 Том 4, 2000 Том 3, 1999 Том 2, 1998 Том 1, 1997

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v11.i4.40
pages 515-525

PROPERTIES OF ATMOSPHERIC PRESSURE GLOW DISCHARGE WITH LIQUID ELECTROLYTE CATHODE

V. A. Titov
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7, Ivanovo, 153000, Russia
V. V. Rybkin
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7, Ivanovo, 153000, Russia
S. A. Smirnov
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7,Ivanovo, 153000, Russia
A. L. Kulentsan
Department of Microelectronic Devices and Materials Technology, Ivanovo State University of Chemical Technology, F. Engels ave., 7,Ivanovo, 153000, Russia
H.-S. Choi
Department of Chemical Engineering, Chungnam National University, 220 Gung-dong, Yuseong-gu, Daejeon, 305-764, Korea

Краткое описание

The characteristics of atmospheric pressure air glow discharge with liquid cathode have been investigated. Distilled water and aqueous solutions of KCl, and CuCl2 were utilized as a cathode. The cathode voltage drop, electric field strength, and emission intensity of some bands for N2 and OH were measured at discharge current from 10 to 50 mA. Gas temperatures and effective vibration temperatures of N2 and OH were estimated on the base of spectral measurements. The reduced electric field strength and γ emission coefficients were calculated also. The electron energy distribution function (EEDF) and some electron parameters (average energy, electron density) were estimated on the base of numerical solution of the Boltzmann kinetic equation.


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