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ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360
Indexed in
PLASMA GENERATION IN A LOW-PRESSURE HOLLOW-CATHODE NON-SELF-SUSTAINED GLOW DISCHARGE
Краткое описание
Research on a hollow-cathode non-self-sustained glow discharge demonstrates the feasibility of discharge operation at pressures from 0.1 Pa. Depending on experimental conditions, the discharge operating voltage can reach ~50 V, which is much lower than that of a self-sustained glow discharge in the same electrode system. The discharge current can range up to 30 A. The working gas is Ar, N2, and N-based gas mixtures. Probe measurements of the discharge plasma show that the electron temperature varies between 1.5 and 7 eV, depending on the pressure of gas and its kind, and the plasma density can reach 1011 cm−3 at 15-A currents. Nitriding in the discharge plasma at 600°C for 2 h made it possible to increase the hardness of Ti (VT1-0) 3.5 times and that of 12Cr18Ni10Ti three times, with a modified layer depth of 35 µm.
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Koval Tamara V., Lopatin Ilya V., Nguen Bao Hung, Ogorodnikov Alexander S., Low Pressure Discharge Characteristics in a Large Sized Hollow Cathode, Advanced Materials Research, 1084, 2015. Crossref