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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360

Выпуски:
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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.2015013757
pages 161-169

INFLUENCE OF NITROGEN LASER BEAM ON THIN-FILM COATINGS

D. M. Lubenko
Institute of High Current Electronics, Siberian Branch of the Russian Academy of Sciences, 2/3 Akademichesky Ave., Tomsk, 634055, Russia
Yury Akhmadeev
Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences
Olga V. Krysina
Institute of High Current Electronics, Siberian Branch of the Russian Academy of Sciences, 2/3 Akademichesky Ave., Tomsk, 634055, Russia; Tomsk State University, Tomsk, Russia
Yurii A. Chumakov
Institute of Strength Physics and Materials Science (ISPMS), Siberian Branch of the Russian Academy of Sciences, 2/4 Akademicheskii Ave., Tomsk, 634055, Russia

Краткое описание

This paper presents the results of experimental and theoretical studies of the influence of a nanosecond laser beam of UV band (λ = 337 nm) with energy of up to 1 mJ on a surface of thin (0.5−5 µm) coatings (Ti, TiN, Al−Si, Al−Si−N) deposited on a glass substrate by a vacuum-arc method. Based on the data obtained, the dependences of the effect of explosive spark formation on the thickness of a coating, its properties, and the conditions of laser influence in an atmosphere of different gases are presented. The mathematical model of the processes occurring in a coating/substrate system exposed to laser irradiation is described; the value of the thickness of a coating at which its destruction occurs with intense sparking is defined.


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