@article{Heidenreich_2015 author = {Sebastian Heidenreich and Hermann Gross and Markus Bar}, title = {BAYESIAN APPROACH TO THE STATISTICAL INVERSE PROBLEM OF SCATTEROMETRY: COMPARISON OF THREE SURROGATE MODELS}, journal = {International Journal for Uncertainty Quantification}, issn = {2152-5080}, year = {2015}, volume = {5}, number = {6}, pages = {511--526} }