@article{Anisimova_1998 author = {I.A. Anisimova and V.P. Anisimov and V.P. Makarov and D.K. Otorbaev}, title = {STRUCTURE AND PROPERTIES OF CARBON AND HYDROCARBON FILMS DEPOSITED IN PLASMA OF LOW-PRESSURE ARC AND UNBALANCED DC MAGNETRON}, journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes}, issn = {1093-3611}, year = {1998}, volume = {2}, number = {1}, pages = {143--154} }