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International Journal for Uncertainty Quantification

Erscheint 6 Ausgaben pro Jahr

ISSN Druckformat: 2152-5080

ISSN Online: 2152-5099

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 1.7 To calculate the five year Impact Factor, citations are counted in 2017 to the previous five years and divided by the source items published in the previous five years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) 5-Year IF: 1.9 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.5 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.0007 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.5 SJR: 0.584 SNIP: 0.676 CiteScore™:: 3 H-Index: 25

Indexed in

BAYESIAN APPROACH TO THE STATISTICAL INVERSE PROBLEM OF SCATTEROMETRY: COMPARISON OF THREE SURROGATE MODELS

Volumen 5, Ausgabe 6, 2015, pp. 511-526
DOI: 10.1615/Int.J.UncertaintyQuantification.2015013050
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ABSTRAKT

Scatterometry provides a fast indirect optical method for the determination of grating geometry parameters of photomasks and is used in mask metrology. To obtain a desired parameter, inverse methods like least squares or the maximum likelihood method are frequently used. A different method, the Bayesian approach, has many advantages against the others, but it is often not used for scatterometry due to the large computational costs. In this paper, we introduce different surrogate models to approximate computationally expensive calculations by fast function evaluations, which enable the Bayesian approach to scatterometry. We introduce the nearest neighbor interpolation, the response surface methodology and a method based on a polynomial chaos expansion. For every surrogate model, we discuss the approximation error and the convergence. Moreover, we apply Markov Chain Monte Carlo sampling to determine desired geometry parameters, and its uncertainties form simulated measurement values based on Bayesian inference. We show that the surrogate model involving polynomial chaos is the most effective.

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