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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

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ISSN Druckformat: 1093-3611

ISSN Online: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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CAPACITIVELY COUPLED HYDROGEN DISCHARGES: MODELING VS. EXPERIMENT

Volumen 8, Ausgabe 4, 2004, pp. 499-518
DOI: 10.1615/HighTempMatProc.v8.i4.20
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ABSTRAKT

This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequencies, pressures and applied voltages. However, the model generally underestimates the electron density and the self-bias potential with respect to measured values. Model predictions for the absolute density of H(n=l) atoms are compared to first diagnostic results, obtained by two-photon absorption laser-induced fluorescence diagnostics at various pressures and frequencies.

REFERENZIERT VON
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  2. Jolly J., Booth J.-P., Atomic hydrogen densities in capacitively coupled very high-frequency plasmas in H2: Effect of excitation frequency, Journal of Applied Physics, 97, 10, 2005. Crossref

  3. Marques L., Jolly J., Alves L. L., Capacitively coupled radio-frequency hydrogen discharges: The role of kinetics, Journal of Applied Physics, 102, 6, 2007. Crossref

  4. Diomede Paola, Hassouni Khaled, Longo Savino, Capitelli Mario, Self-Consistent Modeling of the Effect of Wall-Neutral Reactions on Parallel Plate Radio Frequency Discharge Plasma in Pure Hydrogen, IEEE Transactions on Plasma Science, 35, 5, 2007. Crossref

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