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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

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ISSN Imprimer: 1093-3611

ISSN En ligne: 1940-4360

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MICROSTRUCTURE OF AMORPHOUS COPPER-CARBON THIN FILMS FORMED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Volume 20, Numéro 2, 2016, pp. 115-126
DOI: 10.1615/HighTempMatProc.2016017797
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M. V. Astashynskaya
Research Laboratory, Department of Solid State Physics, Belarusian State University, 4 Nezavisimost Ave., Minsk, 220030, Belarus
Valiantsin V. Astashynski
Research Laboratory, Department of Solid State Physics, Belarusian State University, 4 Nezavisimost Ave, Minsk, 220030, Belarus
N. T. Kvasov
Research Laboratory, Department of Solid State Physics, Belarusian State University, 4 Nezavisimost Ave., Minsk, 220030, Belarus
Vladimir V. Uglov
Belarusian State University, Minsk, 220030, Belarus; National Research Tomsk State University, Tomsk, 634050, Russia

RÉSUMÉ

The microstructure of copper-carbon Cu/a−C:H nanocomposites formed by plasma-enhanced chemical vapor deposition has been determined by transmission electron microscopy. The formation of spherical copper inclusions embedded in the matrix of amorphous carbon was observed. The average size of the copper inclusions decreases from 16 to 5 nm on increasing the carbon concentration from 8 to 75 at.%. A description of the copper clusters formation processes in the reactor chamber was proposed. The results of calculation of the average size of copper clusters are in good agreement with the observed size of the copper inclusions formed in nanocomposite thin films.

MOTS CLÉS: Cu/a-C:H composite thin films, nanoclusters, microstructure, plasma-enhanced chemical vapor deposition
CITÉ PAR

  1. Czarnacka Karolina, Basic measurements of DC properties of nanocomposites (FeCoZr)x(SiOy)(100−x), 2018 ELEKTRO, 2018. Crossref

  2. Koltunowicz Tomasz N., Fedotov Aleksander K., Bondariev Vitalii, Boiko Oleksandr, Troyanchuk Igor, Fedotova Vera, Electrical properties of Ca<inf>3</inf>Co<inf>4</inf>O<inf>9</inf> and Ca<inf>3</inf>Co<inf>3.9</inf>Fe<inf>0.1</inf>O<inf>9</inf> ceramics, 2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP), 2017. Crossref

  3. Bondariev V., Determination of the Percolation Threshold for (FeCoZr)x(SiO2)(100−x) Nanocomposite, in Advances in Thin Films, Nanostructured Materials, and Coatings, 2019. Crossref

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