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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

年間 4 号発行

ISSN 印刷: 1093-3611

ISSN オンライン: 1940-4360

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MODELING OF EMISSION CHARACTERISTICS OF XeCl EXCILAMPS IN PULSE-PERIODIC MODE OF OPERATION

巻 18, 発行 3, 2014, pp. 181-196
DOI: 10.1615/HighTempMatProc.2015015499
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要約

The results of modeling of XeCl excilamp operation in a monopulse regime on Cl2:Xe binary mixes at a total pressure of 10 Torr are considered. The excitation system based on the LC contour is used. Modeling was carried out for an excilamp with the distance between electrodes d = 40 cm. The value of storage capacity varied within 0.2−300 nF. A charging voltage of 30 kV was used. The basic channel for the XeCl molecules formation is the harpoon reaction. The excilamp efficiency can reach 20% on using small values of storage capacity and discharge areas S > 2.5 cm2 with the pulse energy being 0.017 J. A model of the XeCl excilamp has been developed with account for the process of Cl2 regeneration. It is shown that the radiation power of the XeCl excilamp in a pulse-periodic operating mode with the binary mixes of a total pressure of 10 Torr reaches several kilowatts at an efficiency of about 20%.

によって引用された
  1. Anufrick S. S., Volodenkov A. P., Znosko K. F., Losev V. F., An Excimer XeCl Minilaser, Atmospheric and Oceanic Optics, 35, 5, 2022. Crossref

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