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ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360
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STUDY OF PULSED AND CONTINUOUS MODES OF MICROWAVE DISCHARGE PLASMA GENERATION IN A RESONATOR-TYPE PLASMATRON
Краткое описание
This article presents the effects of the medium-power microwave magnetron power supply method on the modes of microwave discharge plasma generation. The measured current signals in the anode circuit of the microwave magnetron, signals of integral optical plasma luminescence, and the registered optical emission spectrum of the discharge were studied using single-phase and three-phase power sources. The power input into the microwave discharge was estimated from the area under the envelope of the integral optical plasma luminescence signal. When the microwave magnetron is supplied by a three-phase power source, a transition to a continuous generation mode is performed. For a three-phase power source, the transition from the minimum power consumption mode (1800 W) to the mode with the maximum level of power consumption (4020 W) leads to an increase in the signal area under study at a time interval of 0.02 s by about 4 times. The diagnostics of the plasma by optical emission spectroscopy showed that changing the power supply mode of the microwave magnetron and the amount of microwave power fed to the discharge in O2 can provide an increase in the intensity of OI lines by more than 6 times. This indicates an augmentation in the concentration of excited particles, which can be involved in various plasma-chemical processes. We conclude that the considered schematic solution of the microwave magnetron power source, which ensures the continuous formation of the microwave discharge, is promising for solving the problems of developing effective microwave vacuum-plasma processes and equipment.
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